This paper reports a 300 mm foundry-fabricated silicon spin-qubit unit cell with more than 99% fidelity in all operations and SPAM fidelity above 99.9%, showing that high-fidelity gate-defined spin qubits survive transition to industrial CMOS-compatible fabrication.

Key Results

  • 300 mm foundry-fabricated silicon spin-qubit unit cell
  • All operations exceed 99% fidelity
  • SPAM fidelity exceeds 99.9%
  • Reported lifetimes/coherence up to , , and in the verified arXiv title-page abstract