Proposes the silicon-fin merged-element transmon and demonstrates its materials and fabrication precursors. Atomically flat Si fin capacitors with Al electrodes were incorporated into lumped-element resonators and measured at low temperature. The work did not demonstrate a complete FinMET qubit.

Key Results

  • Crystalline Si fin used as a parallel-plate dielectric geometry
  • Fin capacitors fabricated into microwave resonators
  • Foundry-oriented route to barrier-thickness and capacitance control
  • Complete Josephson FinMET qubit remained future work