Proposes the silicon-fin merged-element transmon and demonstrates its materials and fabrication precursors. Atomically flat Si fin capacitors with Al electrodes were incorporated into lumped-element resonators and measured at low temperature. The work did not demonstrate a complete FinMET qubit.
Key Results
- Crystalline Si fin used as a parallel-plate dielectric geometry
- Fin capacitors fabricated into microwave resonators
- Foundry-oriented route to barrier-thickness and capacitance control
- Complete Josephson FinMET qubit remained future work
Links
- Journal: Applied Physics Letters
- arXiv: 2108.11519